6 results
Solution chemistry effects on cracking and damage evolution during chemical-mechanical planarization
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- Journal:
- Journal of Materials Research / Volume 25 / Issue 10 / October 2010
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1904-1909
- Print publication:
- October 2010
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Study of crystalline structure N-doped GeSb Phase Change Material for PCRAM applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1251 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1251-H03-22
- Print publication:
- 2010
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- Article
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Fatigue of Damascene Copper Lines under AC Loading
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- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B07-17
- Print publication:
- 2007
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Cu Resistivity in Narrow lines: Dedicated Experiments for Model Optimization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F09-07
- Print publication:
- 2006
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Fracture Properties of Porous MSSQ Films: Impact of Porogen Loading and Burnout
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F04-07
- Print publication:
- 2006
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CMP-induced Peeling in Multi-level Ultra Low-k / Cu Interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F12-07
- Print publication:
- 2006
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